Surface roughness effects on vibration characteristics of AT-cut quartz crystal plate

Li, Mengjie, Li, Peng, Li, Nian, Liu, Dianzi, Kuznetsova, Iren E. and Qian, Zhenghua (2023) Surface roughness effects on vibration characteristics of AT-cut quartz crystal plate. Sensors, 23 (11). ISSN 1424-8220

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Abstract

With the miniaturization and high-frequency requirements of quartz crystal sensors, microscopic issues affecting operating performance, e.g., the surface roughness, are receiving more and more attention. In this study, the activity dip caused by surface roughness is revealed, with the physical mechanism clearly demonstrated. Firstly, the surface roughness is considered as a Gaussian distribution, and the mode coupling properties of an AT-cut quartz crystal plate are systematically investigated under different temperature environments with the aid of two-dimensional thermal field equations. The resonant frequency, frequency–temperature curves, and mode shapes of the quartz crystal plate are obtained through the partial differential equation (PDE) module of COMSOL Multiphysics software for free vibration analysis. For forced vibration analysis, the admittance response and phase response curves of quartz crystal plate are calculated via the piezoelectric module. The results from both free and forced vibration analyses demonstrate that surface roughness reduces the resonant frequency of quartz crystal plate. Additionally, mode coupling is more likely to occur in a crystal plate with a surface roughness, leading to activity dip when temperature varies, which decreases the stability of quartz crystal sensors and should be avoided in device fabrication.

Item Type: Article
Additional Information: Funding information: This work was supported by the Natural Science Foundation of China (12061131013, 11972276, 12172171 and 12102183), the Fundamental Research Funds for the Central Universities (NE2020002 and NS2022011), Jiangsu High-Level Innovative and Entrepreneurial Talents Introduction Plan (Shuangchuang Doctor Program, JSSCBS20210166), the National Natural Science Foundation of Jiangsu Province (BK20211176), the State Key Laboratory of Mechanics and Control for Aerospace Structures (No. MCMS-I-0522G01), Local Science and Technology Development Fund Projects Guided by the Central Government (2021Szvup061), and a project Funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD). Prof. Iren E Kuznetsova thanks Russian Ministry of Science and Higher Education (government task FFWZ-2022-0002) for partial financial support.
Uncontrolled Keywords: activity dip,mode coupling,quartz crystal plate,surface roughness,analytical chemistry,information systems,atomic and molecular physics, and optics,biochemistry,instrumentation,electrical and electronic engineering ,/dk/atira/pure/subjectarea/asjc/1600/1602
Faculty \ School: Faculty of Science > School of Engineering
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Depositing User: LivePure Connector
Date Deposited: 19 May 2023 08:32
Last Modified: 21 Jun 2023 08:32
URI: https://ueaeprints.uea.ac.uk/id/eprint/92104
DOI: 10.3390/s23115168

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