The multi-field coupled vibration analysis of AT-cut quartz crystal resonators with parallelism error

Li, Mengjie, Li, Nian, Li, Peng, Liu, Dianzi, Kuznetsova, Iren E., Qian, Zhenghua and Ma, Tingfeng (2023) The multi-field coupled vibration analysis of AT-cut quartz crystal resonators with parallelism error. Acta Mechanica Solida Sinica, 36 (2). pp. 349-360. ISSN 0894-9166

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Abstract

During the fabrication of quartz crystal resonators (QCRs), parallelism error is inevitably generated, which is rarely investigated. In order to reveal the influence of parallelism error on the working performance of QCRs, the coupled vibration of a non-parallel AT-cut quartz crystal plate with electrodes is systematically studied from the views of theoretical analysis and numerical simulations. The two-dimensional thermal incremental field equations are solved for the free vibration analysis via the coefficient-formed partial differential equation module of the COMSOL Multiphysics software, from which the frequency spectra, frequency–temperature curves, and mode shapes are discussed in detail. Additionally, the piezoelectric module is utilized to obtain the admittance response under different conditions. It is demonstrated that the parallelism error reduces the resonant frequency. Additionally, symmetry broken by the non-parallelism increases the probability of activity dip and is harmful to QCR’s thermal stability. However, if the top and bottom surfaces incline synchronously in the same direction, the influence of parallelism error is tiny. The conclusions achieved are helpful for the QCR design, and the methodology presented can also be applied to other wave devices.

Item Type: Article
Additional Information: Funding Information: This work was supported by the National Natural Science Foundation of China (12061131013, 11972276, 12172171 and 12102183), the Fundamental Research Funds for the Central Universities (NE2020002 and NS2022011), Jiangsu High-Level Innovative and Entrepreneurial Talents Introduction Plan (Shuangchuang Doctor Program, JSSCBS20210166), the National Natural Science Foundation of Jiangsu Province (BK20211176), the State Key Laboratory of Mechanics and Control of Mechanical Structures at NUAA (No. MCMS-I-0522G01), Local Science and Technology Development Fund Projects Guided by the Central Government (2021Szvup061), the Opening Projects from the Key Laboratory of Impact and Safety Engineering of Ningbo University (CJ202104), and a project Funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD). Prof. Iren E Kuznetsova thanks Russian Ministry of Science and Higher Education (government task FFWZ-2022-0002) for partial financial support.
Uncontrolled Keywords: admittance,mode coupling,parallelism error,quartz crystal resonators,resonant frequency,computational mechanics,mechanics of materials,mechanical engineering ,/dk/atira/pure/subjectarea/asjc/2200/2206
Faculty \ School: Faculty of Science > School of Engineering
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Depositing User: LivePure Connector
Date Deposited: 24 Mar 2023 09:30
Last Modified: 17 Apr 2023 09:31
URI: https://ueaeprints.uea.ac.uk/id/eprint/91683
DOI: 10.1007/s10338-023-00384-1

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