Use of thin laminar liquid flows above ablation area for control of ejected material during excimer machining

Dowding, C. F. and Lawrence, J. (2008) Use of thin laminar liquid flows above ablation area for control of ejected material during excimer machining. In: ICALEO 2008 - 27th International Congress on Applications of Lasers and Electro-Optics, 2008-10-20 - 2008-10-23.

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Abstract

To observe excimer laser machining through thin liquid films and the effects thereof on debris control, equipment was designed to contain a small control volume that can be supplied with a laminar thin film of DI water to flow over the workpiece at various flow rates. Using the same equipment, comparison with non-liquid ablation was possible. Reliable calculations of the debris size and density with respect to the distance from the centre of the shot, as well as the identification of modal trends in the dispersion of the debris were obtained from analysis of microscope images with graphical analysis software. The results suggest that debris ejection direction is dependent upon the beam incident angle with the workpiece and that dispersion distance is related to particle size, beam intensity and the material being machined. The results support the suggestion that ablated material is both decelerated and retained more efficiently within a liquid than in a gas.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: electrical and electronic engineering,electronic, optical and magnetic materials ,/dk/atira/pure/subjectarea/asjc/2200/2208
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Depositing User: LivePure Connector
Date Deposited: 18 Aug 2022 13:32
Last Modified: 01 Oct 2022 23:43
URI: https://ueaeprints.uea.ac.uk/id/eprint/87482
DOI: 10.2351/1.5061429

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