Synthesis and properties of crystalline TiO2 films deposited by a HIPIMS+ technique

Wang, Q. M., Kwon, Se-Hun, Hui, Kwun Nam, Kim, Doo-In, Hui, Kwan San ORCID: and Kim, Kwang Ho (2013) Synthesis and properties of crystalline TiO2 films deposited by a HIPIMS+ technique. Vacuum, 89. pp. 90-95. ISSN 0042-207X

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Crystalline TiO 2 thin films were synthesized on the Si and glass substrates by reactive sputtering in a HIPIMS coating system. The films with a bit oxygen deficiency were deposited on the Si and glass substrates at oxygen flux rate of 10 sccm. The phase structure of the films changed with varying the parameters the MPP power pulse, the bias voltage, and working gas pressure. Anatase-dominant, anatase-rutile, and rutile films can be obtained by controlling the deposition parameters. The anatase-dominant and anatase-rutile TiO 2 films possess good photoinduced hydrophilicity and photocatalytic properties. The rutile films exhibited high dielectric constant. The related mechanism and potential application was discussed.

Item Type: Article
Uncontrolled Keywords: dielectric constant,high power impulse magnetron sputtering,phase structure,photocatalytic properties,tio2 film
Faculty \ School: Faculty of Science > School of Mathematics
UEA Research Groups: Faculty of Science > Research Groups > Energy Materials Laboratory
Related URLs:
Depositing User: Pure Connector
Date Deposited: 04 Oct 2016 12:02
Last Modified: 22 Oct 2022 01:37
DOI: 10.1016/j.vacuum.2011.11.020

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